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AssigneeNEXX Systems, Inc.
InventorsArthur Keigler, John Harrell, Zhenqiu Liu, Qunwei Wu
Estimating the term…
A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.
An apparatus for fluid sealing a workpiece, comprising:
A method of fluid sealing a workpiece, comprising:
An apparatus for applying force to an object, comprising:
A method for applying a uniform force to an object, comprising:
The method of claim 48 further comprising rotating the ring to lock at least one engagement feature of the ring into at least one retaining feature defined by the member.
An apparatus for fluid sealing a workpiece, comprising:
An apparatus for applying force to an object, comprising:
Dependencies are inferred from the claim text.