Simultaneous computation of multiple points on one or multiple cut lines

A method of performing model-based optical proximity correction comprising:

• providing a first region of interest (ROI) having an interaction distance;
• locating at least one polygon within said first ROI;
• locating at least one cut line across at least one lateral edge of said at least one polygon, said at least one cut line comprising a plurality of sample points representative of a set of vertices within said first ROI;
• determining an angular position of said at least one cut line across said at least one lateral edge of said at least one polygon;
• determining a first portion and a second portion of said at least one cut line residing on opposing sides of an intersection between said at least one cut line and said at least one lateral edge;
• and
• providing a second ROI by extending said first ROI beyond its interaction distance based on said angular position of said at least one cut line and said first and second portions of said at least one cut line residing on said opposing sides of said intersection, said second ROI for use in correcting for optical proximity.

A program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine to perform method steps for performing model-based optical proximity correction, said method steps comprising:

• providing a region of interest (ROI) having an interaction distance;
• locating at least one finite geometrical shape within said ROI;
• generating at least one cut line across at least one lateral edge of said at least one finite geometrical shape;
• and
• extending said ROI beyond its interaction distance based on a location of said at least one cut line across said at least one lateral edge of said at least one finite geometrical shape to correct for optical proximity.

A program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine to perform method steps for performing model-based optical proximity correction, said method steps comprising:

• providing a first region of interest (ROI) having an interaction distance;
• locating at least one polygon within said first ROI;
• locating at least one cut line across at least one lateral edge of said at least one polygon, said at least one cut line comprising a plurality of sample points representative of a set of vertices within said first ROI;
• determining an angular position of said at least one cut line across said at least one lateral edge of said at least one polygon;
• determining a first portion and a second portion of said at least one cut line residing on opposing sides of an intersection between said at least one cut line and said at least one lateral edge;
• and
• providing a second ROI by extending said first ROI beyond its interaction distance based on said angular position of said at least one cut line and said first and second portions of said at least one cut line residing on said opposing sides of said intersection, said second ROI for use in correcting for optical proximity.