Frequency tunable resonant scanner

A one-axis driving optical scanner comprising:

• a substrate;
• a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed;
• a torsion spring supporting the stage from middle portions of both edge sides of the stage;
• a support portion fixed to the substrate to support the torsion spring;
• a driving portion rotating the stage with respect to the torsion spring forming a center axis;
• at least one driving comb electrode for tuning formed on a lower surface of the stage to a predetermined height in a direction along the center axis;
• and
• at least one fixed comb electrode for tuning formed on the substrate to a predetermined height to be alternate with the driving comb electrode for tuning.

A two-axis driving optical scanner comprising:

• a substrate;
• a stage separated from the substrate to a predetermined height and driven in a first direction with respect to a center axis in a second direction perpendicular to the first direction;
• a first support portion including first torsion springs extending in the second direction from both sides of the stage and a rectangular motion frame having a pair of first portions parallel to each other and respectively connected to the first torsion springs and a pair of second portions parallel to each other and extending in the second direction;
• a stage driving portion including a plurality of first fixed comb electrodes and a plurality of first driving comb electrodes formed on inner sides of the second portions and sides of the stage facing the inner sides of the second portions, respectively;
• a second support portion including second torsion springs extending in the first direction from the second portions and fixing the second torsion springs to the substrate;
• a motion frame driving portion including a plurality of second driving comb electrodes provided at outer sides of the first portions and a plurality of second fixed comb electrodes fixed to correspond to the second driving comb electrodes to rotate the motion frame in the second direction;
• and
• a flat panel type tuning electrode arranged in the area of the substrate corresponding to the stage.

A two-axis driving optical scanner comprising:

• a substrate;
• a stage separated from the substrate to a predetermined height and driven in a first direction with respect to a center axis in a second direction perpendicular to the first direction;
• a first support portion including first torsion springs extending in the second direction from both sides of the stage and a rectangular motion frame having a pair of first portions parallel to each other and respectively connected to the first torsion springs and a pair of second portions parallel to each other and extending in the second direction;
• a stage driving portion including a plurality of first fixed comb electrodes and a plurality of first driving comb electrodes formed on inner sides of the second portions and sides of the stage facing the inner sides of the second portions, respectively;
• a second support portion including second torsion springs extending in the first direction from the second portions and fixing the second torsion springs to the substrate;
• a motion frame driving portion including a plurality of second driving comb electrodes provided at outer sides of the first portions and a plurality of second fixed comb electrodes fixed to correspond to the second driving comb electrodes to rotate the motion frame in the second direction;
• at least one driving comb electrode for tuning formed on a lower surface of the stage to a predetermined height in the second direction;
• and
• at least one fixed comb electrode for tuning formed on the substrate to a predetermined height to be alternate with the driving comb electrode for tuning.