Reduced-pressure drying unit and coating film forming method
AssigneeTokyo Electron Limited
InventorsTakahiro Kitano, Manabu Hama, Shinichi Sugimoto, Naoya Hirakawa
Life of this patent
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Abstract
The invention includes a hermetic container provided with a substrate mount; a vacuum exhauster connected to the hermetic container; a current member; and a current member raising and lowering mechanism. When the current member is raised and lowered as a function of the pressure inside the hermetic container, a liquid flow of the coating solution on the substrate is controlled, thereby controlling the uniformity of the film thickness of the coating solution.
Claims3
1-26. (canceled)
A method for forming a coating film on a substrate, comprising:
- a step of applying to a front face of the substrate a coating solution made by mixing a component of a coating film and a solvent;
- a step of mounting the substrate coated with the coating solution in a hermetic container;
- a reduced-pressure drying step of reducing a pressure in the hermetic container by exhausting an air therein by a vacuum exhauster to vaporize the solvent in the coating solution applied on the substrate;
- a first step, performed in said reduced-pressure drying step, of positioning a current member so that the current member faces the substrate at a first position above the substrate mounted in the hermetic container;
- and
- a second step, performed in said reduced-pressure drying step and after said first step, of moving the current member so that the current member faces the substrate at a second position different from the first position.
A method for forming a coating film on a substrate, comprising:
- a step of applying to a front face of the substrate a coating solution made by mixing a component of a coating film and a solvent;
- a step of mounting the substrate coated with the coating solution on a top face of a mount in a hermetic container;
- subsequently, a step of aligning center positions of the substrate and the mount by an aligning member;
- and
- a reduced-pressure drying step of reducing a pressure in the hermetic container by exhausting an air therein by a vacuum exhauster to vaporize the solvent in the coating solution applied on the substrate.
Dependencies are inferred from the claim text.