Temperature-programmed desorbed gas analyzing apparatus

Abstract

A temperature-programmed desorbed gas analyzing apparatus including a sample chamber 1 in which a sample S is disposed, an infrared heating furnace 2 for heating the sample S disposed in the sample chamber 1, a measuring chamber 3 in which gas desorbed from the sample S by heating is introduced, a turbo molecular pump 4 for reducing the pressure in the measuring chamber 3, a mass spectrometer 5 having a gas detection portion 5a disposed in the measuring chamber 3, an intermediate pressure-reduced chamber 6 provided between the sample chamber 1 and the measuring chamber 3, a first orifice 7 which the intermediate pressure-reduced chamber 6 and the sample chamber 1 intercommunicate with each other, and a second orifice 8 through which the intermediate pressure-reduced chamber 6 and the measuring chamber 3 intercommunicate with each other, and the desorbed gas occurring in the sample chamber 1 is introduced through the first orifice 7, the intermediate pressure-reduced chamber 6 and the second orifice 8 into the measuring chamber 3. The pressure in the intermediate pressure-reduced chamber 6 or the measuring chamber 3 is controlled by pressure adjusting unit so as to be fixed.

Dependencies are inferred from the claim text.