Method and system for synchronizing control limit and equipment performance
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShui-Tien Lin, Hui-Chen Chu, Hui-Wen Yang, Fu-Ching Yang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShui-Tien Lin, Hui-Chen Chu, Hui-Wen Yang, Fu-Ching Yang
Estimating the term…
A method and system for synchronizing a control chart of an SPC system and equipment performance has a chart model (22) with new chart properties; a method for calculating a control limit based on a statistical deviation, a synchronization frequency for setting a time for reviewing new data gathered by the SPC system, and a process catalog for categorizing all control charts that control the same process step, such that the control charts are organized for assignment of the same performance based control limit calculated by using statistics formed by data for control limit values of the control charts.
A method of synchronizing equipment performance and a control limit of a control chart for a statistical process control system, comprising:
An SPC system comprising:
Dependencies are inferred from the claim text.