Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element

A manufacturing method of a light emitting element, comprising the steps of:

• forming a first semiconductor layer of first conductivity type on a substrate;
• forming an active layer on the first semiconductor layer;
• forming a second semiconductor layer of second conductivity type on the active layer;
• and
• forming a first electrode contacting the second semiconductor layer,
• wherein the step of forming the first electrode comprises the steps of:
• forming an ohmic layer on the second semiconductor layer;
• forming an ohmic contact between the second semiconductor layer and the ohmic layer by first annealing;
• forming a first barrier layer on the ohmic layer;
• and
• forming, on the first barrier layer, a light reflecting layer having high reflectance to light generated in the active layer.