Method for manufacturing photodetector for weak light
AssigneeNational Institute of Information and Communication Technology
InventorsMikio Fujiwara, Masahide Sasaki, Makoto Akiba
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Abstract
This invention provides a method for manufacturing a circuit for photon number counting without destroying a FET within the circuit by manufacturing a photodetector for weak light, the photodetector for weak light comprising a circuit on a substrate, the circuit comprising light detection means and a field effect transistor (FET), the method comprising: a light detection means connection step; an FET electrode-to-substrate electrode connection step; an external electrode connection step, a light detection means-to-gate connection step.
Claims13
A method for manufacturing a photodetector for weak light, the photodetector for weak light comprising a circuit on a substrate, the circuit comprising light detection means and a field effect transistor (FET),
- the method comprising:
- a light detection means connection step for attaching the light detection means to the substrate, and connecting one end of an electrode of the light detection means to a first electrode provided in the peripheral portions of the substrate;
- an FET electrode-to-substrate electrode connection step for connecting a gate electrode of the FET to a second electrode, which is provided on the substrate and is connected to a third electrode provided in the peripheral portions of the substrate, and for connecting a source electrode and a drain electrode of the FET to a fourth electrode and a fifth electrode provided in the peripheral portions of the substrate, respectively;
- an external electrode connection step for connecting said first, third, fourth, and fifth electrodes to electrodes on a connection port;
- a light detection means-to-gate connection step of connecting a sixth electrode, which is an electrode of the light detection means other than the first electrode, to the second electrode to which the gate electrode of the FET is connected;
- and
- a gate-external terminal disconnection step for disconnecting the second electrode, to which the sixth electrode of the light detection means and the gate electrode of the FET are connected, from the third electrode.
Dependencies are inferred from the claim text.