System for determining characteristics of substrates employing fluid geometries

A system to determine system conditions by measuring characteristics of a volume of fluid disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising:

• a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume;
• a detector system to sense said change in area and produce signals carrying information concerning said change in area;
• a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions;
• and
• a processing system, in data communication with said memory, to receive said signals and compare said information with said data and produce information corresponding to said system conditions.

A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising:

• a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume;
• a detector system to sense said change in area and produce signals carrying information concerning said change in area;
• a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions;
• and
• a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.

A system to determine processing conditions by measuring characteristics of a volume of imprinting material disposed between a first substrate, lying in a first plane, and a second substrate, lying in a second plane, said system comprising:

• a displacement mechanism to cause relative movement between said volume and one of said first and second substrates to effectuate a change in area of said first and second substrates in superimposition with said volume;
• a detector system to sense said change in area and produce signals carrying information concerning said change in area;
• a memory containing a look-up table of data relating differing shapes of said volume to differing processing conditions;
• and
• a processing system, in data communication with said memory, to receive said signals and compare said information with said data and determine one of said differing processing conditions associated therewith.