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AssigneeVeeco Instruments Inc.
InventorsChanmin Su, Robert Daniels
Estimating the term…
A method of operating a scanning probe microscope includes using a probe having a cantilever, and oscillating the probe at a torsional resonance frequency thereof. In addition, the method includes substantially increasing torsional drive efficiency with dual actuators disposed on the probe or the probe base. First and second actuators may be driven by corresponding first and second drive signals, the first and second drive signals being about 180° out of phase. The maximizing step includes altering at least one of the amplitudes of the first and second drive signals to maximize torsional oscillation. Torsional and flexural oscillation of the cantilever probe can be excited concurrently, sequentially or independently by adjusting the phase of the corresponding drive signals. A pair of cantilever components can be used to form a nanotweezer by rotating the respective arms having corresponding tip portions at the distal ends.
A method of operating a scanning probe microscope, the method comprising:
A method of operating a scanning probe microscope in torsional resonance mode, the method comprising the steps of:
26 The method of claim 25, wherein the actuator includes first and second actuator elements disposed substantially symmetrically about the probe and wherein said aligning step includes balancing the output of the actuator elements.
The method of claim 26, and said balancing step includes applying first and second drive signals to the first and second actuators, and modifying the first and second drive signals so as to achieve the alignment.
A scanning probe microscope comprising:
A scanning probe microscope comprising:
Dependencies are inferred from the claim text.