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US 2004/0204901 A1Published application
Position detecting method and apparatus
AssigneeCanon Kabushiki Kaisha
InventorNozomu Hayashi
Life of this patent
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Abstract
A position detecting method includes steps of sensing an image of first and second marks, orthogonal transforming a signal obtained in the sensing step, and calculating each position of the first and second marks based on a phase of a corresponding frequency component obtained in the orthogonal transform step.
Claims16
A position detecting method comprising steps of:
- sensing an image of first and second marks;
- orthogonal transforming a signal obtained in said sensing step;
- and
- calculating each position of the first and second marks based on a phase of a corresponding frequency component obtained in said transform step.
1 more element
A position detecting apparatus comprising:
- a sensing unit which senses an image of first and second marks;
- a transform unit which orthogonal transforms a signal obtained by said sensing unit;
- and
- a calculation unit which calculates each position of the first and second marks based on a phase of a corresponding frequency component obtained by said transform unit.
1 more element
Dependencies are inferred from the claim text.