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US 2004/0204885 A1Published application
Flow sensor signal conversion
AssigneeCelerity, Inc.
InventorsChiun Wang, William S. Valentine, John M. Lull
Life of this patent
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Abstract
A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.
Claims51
1-85 (canceled)
A flow sensor comprising:
- a conduit adapted to convey fluids;
- a circuit coupled to the conduit and configured to produce a sensor output signal indicative of a flow rate of an arbitrary fluid through the conduit;
- and
- at least one storage medium storing information including at least one representation of a characteristic function of the flow sensor.
1 more element
A mass flow controller comprising:
- a flow sensor adapted to sense fluid flow in a flow path and provide a sensor output signal indicative of the mass flow rate of a fluid in the flow path;
- a storage medium encoded with at least one representation of a characteristic function of the flow sensor;
- a processor coupled to the flow sensor to receive the sensor output signal, the processor configured to convert the sensor output signal to a flow signal based on the characteristic function;
- a controller coupled to the flow meter and adapted to provide a drive signal based at least in part on the flow signal;
- a valve actuator adapted to receive the drive signal from the controller;
- and
- a valve coupled to the flow path, the valve adapted to permit flow through the flow path depending on the displacement of a controlled portion of the valve.
4 more elements
Dependencies are inferred from the claim text.