Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor
AssigneeInternational Business Machines Corporation
InventorsSri M. Sri-Jayantha, Hien Dang, Arun Sharma, Evangelos S. Eleftheriou, Mark A. Lantz, Charalampos Pozidis
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Abstract
A servo control system for a micro-electromechanical systems (MEMS)-based motion control system (and method therefor), includes a motion generator having an inherent stiffness component.
Claims37
A servo control system for a micro-electromechanical systems (MEMS)-based motion control system, comprising:
- a motion generator having an inherent stiffness component.
A servo control system for a micro-electromechanical systems (MEMS)-based motion control system, comprising:
- a scanner having inherent stiffness;
- and
- a feedforward mechanism operatively coupled to said scanner for feedforwarding a component for counterbalancing the stiffness of said scanner.
A servo controller for controlling movement of a scanner, comprising:
- a servo unit for generating a first-axis motion and a second-axis motion under a track-follow-scan mode and a turn-around mode,
- wherein a scan rate is programmable by choosing an appropriate slope for a ramp trajectory for the servo unit when generating the first-axis motion.
A method of performing storage-centric applications, comprising:
- performing a two-dimensional seek at a first speed and at a first precision;
- and
- performing a one-dimensional scan at a second speed and at a second precision,
- wherein said first speed is higher than said second speed, and wherein said first precision is less than said second precision.
A servo control system for a micro-electromechanical (MEMS)-based motion control system, comprising:
- a proportional-integral-derivative (PID) controller comprising a type-1 system,
- said controller having a steady position error due to a ramp motion.
A method of controlling a scanner in a micro-electromechanical system (MEMS)-based motion control device, comprising:
- generating a velocity profile for each X-seek;
- and
- managing a stiffness of said scanner.
Dependencies are inferred from the claim text.