Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device

A laser apparatus comprising:

• an optical system for sampling a part of a laser beam emitted from an oscillator;
• a sensor for generating an electric signal including fluctuation in energy of the laser beam as a data from the part of the laser beam;
• a means for performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam, and controlling a position of a beam spot of the laser beam in order to change a relative speed of the beam spot to an object in phase with the fluctuation in energy of the laser beam,
• wherein a position of the object is fixed.

A laser irradiation method comprising:

• sampling a part of a laser beam emitted from an oscillator;
• generating an electric signal including fluctuation in energy of the laser beam as data;
• performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam;
• and
• controlling a relative speed of an beam spot of the laser beam to an object in order to change in phase with the fluctuation in energy of the laser beam.

A laser irradiation method comprising of:

• sampling a part of a laser beam emitted from an oscillator;
• generating an electric signal including fluctuation in energy of the laser beam as data;
• performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam;
• and
• controlling a position of an object in order to a relative speed of an beam spot of the laser beam to the object in phase with the fluctuation in energy of the laser beam.

A laser irradiation method comprising:

• sampling a part of a laser beam emitted from an oscillator;
• generating an electric signal including fluctuation in energy of the laser beam as data;
• performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam;
• and
• controlling a position of a beam spot of the laser beam in order to change a relative speed of the beam spot to an object in phase with the fluctuation in energy of the laser beam,.
• wherein a position of the object is fixed.

A method of manufacturing a semiconductor device, comprising:

• sampling a part of a laser beam emitted from an oscillator;
• generating an electric signal including fluctuation in energy of the laser beam as data form the part of the laser beam;
• performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam;
• and
• controlling a relative speed of an beam spot of the laser beam to a semiconductor film in order to change in phase with the fluctuation in energy of the laser beam,
• irradiating the laser beam to the semiconductor film to enhance crystallinity of the semiconductor film.

A method of manufacturing a semiconductor device, comprising:

• sampling a part of a laser beam emitted from an oscillator;
• generating an electric signal including fluctuation in energy of the laser beam as data form the part of the laser beam;
• performing signal processing to the electrical signal to calculate a frequency, a amplitude, and a phase of the fluctuation in energy of the laser beam;
• controlling a relative speed of an beam spot of the laser beam to a semiconductor film with a phase of a signal in synchronization with oscillation of the laser beam emitted from the oscillator, a phase difference between the calculated phase and the phase of the signal, a ratio of energy of the part of the laser beam to the laser beam emitted form the oscillator, the calculated frequency, and the calculated amplitude in order to change in phase with the fluctuation in energy of the laser beam;
• and
• irradiating the laser beam to the semiconductor film to enhance crystallinity of the semiconductor film.