Resist film forming method and a photomask manufacturing method
AssigneeHoya Corporation
InventorShuho Motomura
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Abstract
A resist film forming method including a resist coating step, comprising steps of rising by a capillary phenomenon a coating liquid stored below the coating surface of a substrate held facing-downward, bringing the rised coating liquid into contact with the coating surface via a nozzle, and scanning the nozzle along the coating surface of the substrate thereby coating the resist film on the coating surface of the substrate, wherein said method further including a step of drying the coated resist film by moving the substrate at a predetermined speed with the coating surface of the substrate facing downward.
Claims7
A resist film forming method including a resist coating step, comprising steps of:
- rising by a capillary phenomenon a coating liquid stored below the coating surface of a substrate held facing-downward;
- bringing the rised coating liquid into contact with the coating surface via a nozzle;
- and
- scanning the nozzle along the coating surface of the substrate thereby coating the resist film on the coating surface of the substrate,
- wherein said method further including a step of drying the coated resist film by moving the substrate at a predetermined speed with the coating surface of the substrate facing downward.
In a photomask manufacturing method, the improvement wherein the resist coating step comprising a step of
- rising by a capillary phenomenon a coating liquid stored below the coating surface of a substrate held facing-downward;
- bringing the rised coating liquid into contact with the coating surface via a nozzle;
- and
- scanning the nozzle along the coating surface of the substrate thereby coating the resist film on the coating surface of the substrate,
- wherein said method further including a step of drying the coated resist film by moving the substrate at a predetermined speed with the coating surface of the substrate facing downward.
Dependencies are inferred from the claim text.