Electrical property evaluation apparatus
AssigneeSII NanoTechnology Inc.
InventorYoshiharu Sugano
Life of this patent
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Abstract
An electrical property evaluation apparatus for measuring an electrical property of an object to be measured, including: a magnetic field generating mechanism for generating a magnetic field in a target area on the object; a magnetic sensor for measuring the magnetic field near the target area; a contact having a conducting probe, the contact supported so that the probe can be brought into contact with the target area; a voltage source for applying a voltage to the probe; and an electrical property measuring section for measuring a current or an electrical resistance between the probe and the object in contact with each other.
Claims9
An electrical property evaluation apparatus for measuring an electrical property of an object to be measured, comprising:
- a magnetic-field generating mechanism for generating a magnetic field in a target area on the object;
- a magnetic sensor for measuring the magnetic field near the target area;
- a contact having a conducting probe, the contact supported so that the probe can be brought into contact with the target area;
- a voltage source for applying a voltage to the probe;
- and
- an electrical property measuring section for measuring a current or an electrical resistance between the probe and the object in contact with each other.
Dependencies are inferred from the claim text.