Matrix type piezoelectric/electrostrictive device and manufacturing method thereof

A method of manufacturing a matrix type piezoelectric/electrostrictive device in which a plurality of piezoelectric/electrostrictive elements almost in the shape of a pillar are two-dimensionally arranged on a thick ceramic substrate, wherein each of the piezoelectric/electrostrictive elements includes a piezoelectric/electrostrictive substance and at least a pair of electrodes, the percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 1% or less, and the piezoelectric/electrostrictive substance forms a curved surface near a joined section between the piezoelectric/electrostrictive substance and the ceramic substrate, characterized in that the method comprises:

• a first step of providing a plurality of ceramic green sheets containing a piezoelectric/electrostrictive material as a major component,
• a second step of forming opening sections having an almost right-angled quadrilateral shape, in which at least two corners are curved, at specific positions of a plurality of the ceramic green sheets,
• a third step of stacking a plurality of the ceramic green sheets in which the opening sections are formed to obtain a ceramic green laminate having holes,
• a fourth step of integrally sintering the ceramic green laminate to obtain a ceramic laminate having holes,
• a fifth step of forming electrodes at least on side walls which make up the holes in the ceramic laminate,
• a sixth step of cutting the ceramic laminate at specific positions in a direction perpendicular to the arrangement of the holes and perpendicular to the openings of the holes to obtain a comb tooth-shaped ceramic laminate, and
• a seventh step of cutting the comb tooth of the comb tooth-shaped ceramic laminate in a direction perpendicular to the cutting surface obtained in the sixth step and perpendicular to the arrangement of the comb tooth.