Piezoelectric component and method for producing it

Abstract

The invention describes a method for producing a piezoelectric component comprising at least two stacked crystal filters. By means of the deposition of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropriate, second piezoelectric layer, it is possible, in a simple manner, with a minimum of process steps, to produce a piezoelectric component comprising two stacked crystal filters which are directly connected to one another via their bottom and central electrodes. The piezoelectric component according to the invention furthermore has the advantage that applications in which a high stop band attenuation is important can be realized with a relatively small number of filter stages. In this case, through the use of at least two stacked crystal filters, it is possible to achieve an excellent out-of-band rejection also for “single-ended signals”.

Dependencies are inferred from the claim text.