Wafer blade contact monitor
AssigneeLSI Logic Corporation
InventorDavid A. Stacey
Life of this patent
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Abstract
A method and apparatus are provided for detecting contact between a wafer blade of a wafer-handling robot and a component in a wafer-handling system. The robot moves the wafer blade within the system while the wafer blade is maintained at an electrical potential, which is different from an electrical potential of the component. Contact between the wafer blade and the component is detected by sensing a change in the electrical potential of the wafer blade during the contact.
Claims20
A method of detecting contact between a wafer blade of a wafer-handling robot and a component in a wafer-handling system, the method comprising:
- (a) moving the wafer blade within the system with the robot;
- (b) maintaining the wafer blade at an electrical potential during movement of the wafer blade, wherein the electrical potential of the wafer blade is different from an electrical potential of the component;
- and
- (c) sensing a change in the electrical potential of the wafer blade during contact of the wafer blade with the component.
A wafer-handling system comprising:
- a component having an electrical potential;
- a wafer-handling robot having a robotic arm, which supports a wafer blade for transporting a wafer in the system, wherein the wafer blade has a different electrical potential than the component;
- and
- a sensor electrically coupled to the wafer blade to sense a change in the electrical potential of the wafer blade during contact between the wafer blade and the component.
A wafer blade contact sensor for sensing contact between a wafer blade of a wafer-handling robot and a component in a wafer-handling system, the contact sensor comprising:
- a sense wire for electrically coupling to the wafer blade;
- and
- a sensor circuit, which is electrically-coupled to the sense wire and generates a contact output signal in response to a change in an electrical potential of the sense wire.
Dependencies are inferred from the claim text.