Process for producing thin film transistor

Abstract

In a process for forming a thin film transistor, a gate insulator layer is formed on a semiconductor layer. A gate structure is formed on the gate insulator layer, and source/drain structures are formed in the semiconductor layer. The source/drain structures are spaced from each other by a channel region. A first kind of doping material is injected into a first end portion of the channel region in a first direction of a first angle from a surface of the semiconductor layer to form a first LDD structure, and a second kind of doping material is injected into the first end portion of the channel region in a second direction of a second angle from the surface of the semiconductor layer to form a first halo structure in contact with the first LDD structure.

Dependencies are inferred from the claim text.