Multilayer ceramic pressure sensor

A pressure sensing device, comprising:

• a first ceramic layer;
• a second ceramic layer having a first portion of a first side adjacent to the first ceramic layer and a second portion of the first side forming a cavity with the first ceramic layer, wherein the second ceramic layer is deformable due to a change in pressure on a second side, the first ceramic layer being substantially not deformed by the change in pressure;
• a first piezoresistor positioned on the first ceramic layer and within the cavity;
• a second piezoresistor positioned on a second side of the second ceramic layer and within the cavity;
• and
• a first contact pad coupled to the first piezoresistor for receiving a first signal therefrom;
• and
• a second contact pad coupled to the second piezoresistor for receiving a second signal therefrom, wherein the first and second signals are compared to indicate the change in pressure.

A method for making a pressure sensing device, comprising:

• providing a first ceramic layer;
• providing a second ceramic layer having a first portion of a first side adjacent to the first ceramic layer and a second portion of the first side forming a cavity with the first ceramic layer, wherein the second ceramic layer is deformable due to a change in pressure on a second side, the first ceramic layer being substantially not deformed by the change in pressure;
• providing a first piezoresistor positioned on the first ceramic layer and within the cavity;
• providing a second piezoresistor positioned on the first side of the second ceramic layer and within the cavity;
• and
• providing a first contact pad coupled to the first piezoresistor for receiving a first signal therefrom;
• and
• providing a second contact pad coupled to the second piezoresistor for receiving a second signal therefrom, wherein the first and second signals are compared to indicate the change in pressure.