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US 2004/0175666 A1Published application
Heat treatment apparatus
AssigneeTokyo Electron Limited
InventorYukimasa Saito
Life of this patent
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Abstract
Exhaust pressure in an exhaust system 15 that evacuates a processing furnace 2 is determined as absolute pressure by using a differential manometer 23, which measures the exhaust pressure as differential pressure, and a barometer, which measures atmospheric pressure as absolute pressure. An opening of a pressure regulating valve 25 is adjusted based on the absolute exhaust pressure thus determined so that pressure in the processing furnace 2 is regulated.
Claims9
A heat treatment system comprising:
- a processing furnace that accommodates a workpiece therein;
- a process gas supply system that supplies a process gas into the processing furnace;
- a heater that heats the processing furnace;
- an exhaust system that evacuates the processing furnace and has an exhaust passage;
- exhaust pressure regulating apparatus that regulates exhaust pressure in the exhaust passage;
- a differential manometer that measures exhaust pressure in the exhaust passage expressed as differential pressure with respect to atmospheric pressure;
- a barometer that measures atmospheric pressure expressed as absolute pressure;
- and
- a controller that controls the exhaust pressure regulating apparatus based on exhaust pressure expressed as absolute pressure, which is evaluated based on the exhaust pressure measured by the differential manometer and the atmospheric pressure measured by the barometer.
6 more elements
Dependencies are inferred from the claim text.