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AssigneeCarl Zeiss SMT GmbH
InventorsKlaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch, Alexander Kohl
Estimating the term…
A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).
An adjustment arrangement of an optical element, in particular of a lens in an optical system, the optical element having a circumference and being mounted in a mount by a number of bearing feet arranged in a distributed manner over the circumference of the optical element, the optical element being selectively deformable by actuators, and at least some of the bearing feet being engaged by at least one actuator in such a way that the respective bearing foot can be displaced in a direction substantially orthogonal to said circumference.
A projection lens system in semiconductor lithography with a number of optical elements, at least one optical element being mounted in a mount by a number of bearing feet arranged in a distributed manner over the circumference of the optical element, each of the bearing feet having two pivots formed as solid joints, one end of a lever element being arranged between the two solid joints, one of said solid joints connecting the lever element to the mount and the other solid joint connecting the lever element to a region of the optical element, and the actuator engaging an end of the lever element remote from the solid joints.
A projection lens system in semiconductor lithography with a number of optical elements and with at least one optical element being mounted in a mount by a number of bearing feet arranged in a distributed manner over the circumference, the optical element being selectively deformable by actuators, and at least some of the bearing feet being engaged by at least one actuator in such a way that the respective bearing foot can be displaced in a direction substantially orthogonal to said circumference.
Dependencies are inferred from the claim text.