US 2004/0171858 A1 · Asymmetric Group 8 (VIII) metallocene compounds

Abstract

Asymmetric, disubstituted metallocene compounds have the general formula CpMCp′ where M is a metal selected from the group consisting of Ru, Os and Fe; Cp is a first substituted cyclopentadienyl or indenyl moiety that includes at least one substituent group D1; Cp′ is a second substituted cyclopentadienyl or indenyl moiety that includes at least one substituent group D1′. D1 is different from D1′. D1 is X; Ca1Hb1Xc1; Ca2Hb2Xc2(C═O)Ca1Hb1Xc1; or Ca2Hb2Xc2OCa1Hb1Xc1, where X is a halogen atom or nitro group; a1 is an integer between 2 and 8; b1 is an integer between 0 and 2(a1)+1−c1; c1 is an integer between 0 and 2(a1)+1−b1; b1+c1 is at least 1; a2 is an integer between 0 and 8; b2 is an integer between 0 and 2(a2)+1−c2; and c2 is an integer between 0 and 2(a2)+1−b2; and D1′ is X; Ca1Hb1Xc1; Ca2Hb2Xc2(C═O)Ca1Hb1Xc1; or Ca2Hb2Xc2OCa1Hb1Xc1, where X is a halogen atom or nitro group; a1 is an integer between 1 and 8; b1 is an integer between 0 and 2(a2)+1−cl; c1 is an integer between 0 and 2(a1)+1−b1; b1+c1 is at least 1; a2 is an integer between 0 and 8; b2 is an integer between 0 and 2(a2)+1−c2; and c2 is an integer between 0 and 2(a2)+1−b2. The compounds can be employed as precursors in film deposition processes.

Claims10

Dependent claims

An asymmetric Group 8 (VIII) metallocene of the general formula CpMCp′, where

M is a metal selected from the group consisting of Ru, Os and Fe;
Cp is a first substituted cyclopentadienyl or indenyl moiety that includes at least one substituent group D1;
Cp′ is a second substituted cyclopentadienyl or indenyl moiety that includes at least one substituent group D1′;
wherein
D1 is different from D1′;
D1 is selected from the group consisting of:
X;
Ca1Hb1Xc1;
Ca2Hb2Xc2(C═O)Ca1Hb1Xc1;
and
Ca2Hb2Xc2OCa1Hb1Xc1,
where
X is F, Cl, Br, I or NO2;
a1 is an integer from 2 to 8;
b1 is an integer from 0 to 2(a1)+1−c1;
c1 is an integer from 0 to 2(a1)+1−b1;
b1+c1 is at least 1;
a2 is an integer from 0 to 8;
b2 is an integer from 0 to 2(a2)+1−c2;
c2 is an integer from 0 to 2(a2)+1−b2;
and
D1′ is selected from the group consisting of:
X;
Ca1Hb1Xc1;
Ca2Hb2Xc2(C═O)Ca1Hb1Xc1;
and
Ca2Hb2Xc2OCa1Hb1Xc1,
where,
X is Fl, Cl, Br or I or NO2;
a1 is an integer from 1 to 8;
b1 is an integer from 0 to 2(a1)+1−c1;
c1 is an integer from 0 to 2(a1)+1−b1;
b1+c1 is equal to or greater than 1;
a2 is an integer from 0 to 8;
b2 is an integer from 0 to 2(a2)+1−c2;
c2 is an integer from 0 to 2(a2)+1−b2;
and
b2+c2 is equal to or greater than 1.

35 more elements

Dependencies are inferred from the claim text.

Asymmetric Group 8 (VIII) metallocene compounds

Life of this patent

Asymmetric Group 8 (VIII) metallocene compounds

Life of this patent

Abstract

Claims10