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US 2004/0171494 A1Published application
Vacuum processing for fabrication of superconducting films fabricated by metal-organic processing
OwnerIgor Seleznev, Michael J. Cimainventors
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Abstract
A method of producing an oriented oxide superconducting film. A metal oxyfluoride film is provided on a substrate. The metal oxyfluoride film comprises the constituent metallic elements of an oxide superconductor in substantially stoichiometric proportions. The film is then converted into the oxide superconductor in a processing gas having a total pressure less than atmospheric pressure.
Claims62
A method of producing an oriented oxide superconducting film, comprising:
- (a) providing a metal oxyfluoride film on a substrate, said metal oxyfluoride film comprising the constituent metallic elements of an oxide superconductor in substantially stoichiometric proportions;
- (b) initiating convertion of the metal oxyfluoride into the oxide superconductor in a processing gas having a moisture content of less than 1% by mass and a total pressure less than atmospheric pressure for a time sufficient to form a layer of the oxide superconductor at the substrate/film interface;
- and
- (c) completing conversion of the metal oxyfluoride into the oxide superconductor in a processing gas having a moisture content greater than that in step (b) and a total pressure less than atmospheric pressure.
1 more element
A c-axis textured superconducting film fabricated by the steps of
- (a) providing a metal oxyfluoride film on a substrate, said metal oxyfluoride film comprising the constituent metallic elements of an oxide superconductor in substantially stoichiometric proportions;
- (b) initiating conversion of the metal oxyfluoride into the oxide superconductor in a processing gas having a moisture content of less than 5% by mass and a total pressure less than atmospheric pressure for a time sufficient to form a layer of the oxide superconductor at the substrate/film interface;
- and
- (c) completing conversion of the metal oxyfluoride into the oxide superconductor in a processing gas having a moisture content greater than that in step (b) and a total pressure less than atmospheric pressure.
1 more element
A method of producing an oriented oxide superconducting film, comprising:
- (a) providing a metal oxyfluoride film on a substrate, said metal oxyfluoride film comprising the constituent metallic elements of an oxide superconductor in substantially stoichiometric proportions;
- (b) converting the metal oxyfluoride into the oxide superconductor in a processing gas having a total pressure less than atmospheric pressure.
Dependencies are inferred from the claim text.