Electrically isolated support for overlying MEM structure

A MEM apparatus comprising:

• a substrate;
• a first structure supported on said substrate;
• a movable component disposed between said substrate and said first structure and extending across an area of said substrate;
• and
• at least one support structure disposed within said area of said substrate for supporting said first structure.

A MEM apparatus, comprising:

• a movable optical component;
• an actuator mechanism for effecting movement of said optical component;
• a cover extending over at least a portion of said actuator mechanism, said cover further extending across an area;
• and
• at least one support structure, disposed within said area, for supporting said cover.

A MEM apparatus, comprising:

• a substrate;
• and
• a micromachined structure formed on said substrate including:
• an electrical lead supported on said substrate;
• and
• filter structure, supported on said substrate, for filtering an undesired electrical component from said lead.

A method for use in constructing a MEM device, comprising the steps of:

• first establishing an active component on a substrate, said active component comprising one of movable component and an electrostatic component, said active component extending across an area of said substrate;
• second establishing an overlying structure extending over at least a portion of said active component;
• and
• third establishing at least one support structure within said area for supporting said overlying structure.