Particle filter for partially enclosed microelectromechanical systems
OwnerMurray Steven Rodgersinventor
Life of this patent
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Abstract
A particle filter for a partially enclosed microelectromechanical systems that include a substrate material having at least one micro-device formed thereon. The particle filter includes a first structural layer forming a filter bottom and a second structural layer forming a filter wall. The filter bottom and filter wall are interconnected by at least one support feature to define a particle trap between the filter wall and filter bottom. The particle trap is a gap formed by mating, but non-interconnected portions of the filter wall and filter bottom that operates to trap and prevent particles from passing beyond the filter bottom into the microelectromechanical system.
Claims8
A method for constructing a particle filter in a microelectromechanical system, the method comprising:
- depositing and patterning a plurality of alternating layers of filter forming material and sacrificial material on a substrate material to form at least one filter bottom and at least one filter wall;
- and
- removing the sacrificial material to release the at least one filter bottom and the at least one filter wall to define a particle trap between interfacing portions of the filter bottom and filter wall.
Dependencies are inferred from the claim text.