Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition
AssigneeApplied Materials, Inc.
InventorLawrence C. Lei
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Abstract
An apparatus and method for effectively and controllably vaporizing a solid precursor material is provided. In particular, the present invention provides an apparatus that includes a housing defining a sealed interior volume having an inlet for receiving a carrier gas, at least one surface within the housing for the application of a solid precursor, and a heating member for heating the solid precursor. The heating member can be located in the housing or in the surface within the housing. The surface can be a rod, baffle, mesh, or grating, and is preferably s-shaped or cone-shaped. Optionally, an outlet connects the housing to a reaction chamber. A method for vaporizing a solid precursor using the apparatus of the present invention is also provided.
Claims20
An apparatus for vaporizing a solid precursor, comprising:
- a housing defining an interior volume having an inlet for receiving a carrier gas;
- at least two surfaces contained in the housing, wherein the at least two surfaces have the solid precursor applied thereto and are spaced to allow passage of the carrier gas therebetween;
- and
- at least one heating member contained in the housing.
An apparatus for vaporizing a solid precursor, comprising:
- a housing defining an interior volume having an inlet for receiving a carrier gas and an outlet for delivering the carrier gas and a vaporized solid precursor, wherein the vaporized solid precursor originates from the solid precursor;
- a first wall to support the inlet;
- at least one surface contained in the housing for application of the solid precursor, wherein the at least one surface is located on a second wall adjoining to the first wall and the at least one surface is spaced to allow passage of the carrier gas;
- and
- a heating member contained in the housing.
An apparatus for vaporizing a solid precursor, comprising:
- a housing defining an interior volume having an inlet for receiving a carrier gas and an outlet for delivering the carrier gas and a vaporized solid precursor, wherein the vaporized solid precursor originates from the solid precursor;
- at least two surfaces contained in the housing, wherein the at least two surfaces have the solid precursor applied thereto and are spaced to allow passage of the carrier gas therebetween;
- and
- at least one heating member contained in at least one wall of the housing.
Dependencies are inferred from the claim text.