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US 2004/0169838 A1Published application
Combined on-axis and off-axis illumination
AssigneeIntel Corporation
InventorThomas D. Lee
Life of this patent
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Abstract
The present invention describes an aperture comprising an opaque plate with a central opening and at least one peripheral opening and a method for combining an on-axis component and at least one off-axis component of illumination light.
Claims15
An apparatus comprising:
- an opaque plate;
- a central opening disposed in said opaque plate;
- and
- at least one peripheral opening disposed away from said central opening in said opaque plate.
1 more element
An apparatus comprising:
- a source of light;
- optical elements;
- and
- an aperture, said aperture comprising:
- an opaque plate;
- a central opening disposed in said opaque plate;
- and
- at least one peripheral opening disposed away from said central opening in said opaque plate.
5 more elements
A method comprising:
- providing an illumination beam;
- forming an on-axis component of said illumination beam;
- forming at least one off-axis component of said illumination beam;
- combining said on-axis component and said at least one off-axis component into an exposure beam.
1 more element
Dependencies are inferred from the claim text.