Apparatus and method for detection and measurement of environmental parameters

A method for in-situ measurement and recording of at least one parameter in a semiconductor fabrication process comprising a plurality of stages, said method comprising:

• (a) monitoring said parameter in a stage of said plurality of stages;
• (b) converting said parameter into data;
• (c) logging said data and an identification of said stage;
• and
• (d) repeating (a)-(d) for said plurality of stages.

A device for in-situ monitoring of at least one environmental parameter in a photolithographic process comprising a plurality of stages, said device comprising:

• at least one sensor for converting said environmental parameter of an associated stage into a sensor output;
• an analog to digital converter for converting said sensor output to digital data;
• and
• a communication module to communicate said digital data and an identification of said associated stage of said plurality of stages.

A device for use in conjunction with a reticle for in-situ monitoring of at least one electrical parameter in a semiconductor fabrication process comprising a plurality of stages, said device comprising:

• a sensor for converting said electrical parameter of a stage into a sensor output;
• an analog to digital converter for converting said sensor output to digital data;
• a data logger comprising a timestamping module for logging said digital data and an identification of said stage;
• and
• an RF (radio frequency) communication module coupled to said data logger.

A method for in-situ measurement and recording of at least one parameter in a semiconductor fabrication process comprising at least one stage, said method comprising:

• (a) monitoring said parameter in said stage;
• (b) converting said parameter into data;
• and
• (c) logging said data and an identification of said stage.

A device for monitoring environmental parameters comprising:

• an electrostatic sensor for detecting electrostatic field and converting said electrostatic field into a first output;
• an electrostatic discharge (ESD) sensor for detecting an electrostatic discharge and converting said electrostatic discharge into a second sensor output;
• an analog to digital converter coupled to said electrostatic sensor and said ESD sensor for converting said first and second sensor outputs to first and second digital data, respectively;
• and
• a data logger comprising a timestamping module for logging said first and second digital data.

A method for localizing electrostatic discharges (ESD) by detecting electrostatic discharges and electrostatic field, the method comprising:

• detecting an electrostatic discharge and converting it into a first output;
• detecting said electrostatic field and converting it into a second output;
• and
• determining a valid local electrostatic discharge based on said first and second outputs.

A method for localizing electrostatic discharges (ESD) by detecting electrostatic discharges and electrostatic field, the method comprising:

• detecting an electrostatic discharge and converting it into a first output;
• detecting a change in said electrostatic field and converting it into a second output;
• and
• determining a valid local electrostatic discharge based on said first and second outputs.