Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed

Abstract

Affords holders for semiconductor or liquid-crystal manufacturing devices—and semiconductor manufacturing devices in which the holders are installed—in which temperature uniformity in the processed-object retaining face of their resistive-heating-element containing ceramic susceptor is enhanced. By arranging a metal plate on a resistive-heating-element containing ceramic susceptor opposite its processed-object retaining side, the surface temperature of a semiconductor wafer or LCD glass being retained on the susceptor can be made uniform. Although simply setting the metal sheet on the ceramic susceptor is efficacious, fastening it by bonding, screws, snug-fitting, or vacuum adhesion further enhances the efficacy.

Dependencies are inferred from the claim text.