Conductors created by metal deposition using a selective passivation layer and related methods
AssigneeUniversity of North Texas
InventorsJeffry A. Kelber, Jipu Lei, Noel P. Magtoto, Sergei Rudenja
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AssigneeUniversity of North Texas
InventorsJeffry A. Kelber, Jipu Lei, Noel P. Magtoto, Sergei Rudenja
Estimating the term…
Conductor structures include a substrate, a first conducting layer that is selectively passivated from growth of unwanted surface layers by the application of a selective passivation layer, and a second conducting layer that is applied onto the selective passivation layer. The selective passivation layer prevents the combination of unwanted materials with the first conducting layer while allowing the combination of the applied second conducting layer with the first conducting layer. The selective passivation layer is displaced by the second conducting layer and remains as a passivation layer on the exposed surface of the second conducting layer being displaced, thereby protecting the first and second conducting layers from unwanted materials or unwanted surface layers. Methods of fabricating conductor structures are also provided.
A conductor structure for electronic component applications formed by metal deposition, comprising:
A method for making a conductor structure for electronic component applications formed by metal deposition, comprising the steps of:
A method of depositing a plurality of atomic layers of a second conductor on a first conductor, comprising:
A method of depositing copper on ruthenium comprising:
A conductive structure comprising:
A conductive structure comprising:
Dependencies are inferred from the claim text.