Method of producing substrate with mark, program for reading mark, and apparatus for reading mark
AssigneeCanon Kabushiki Kaisha
InventorShigeo Kiso
Life of this patent
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Abstract
A method of producing a substrate with marks is provided in which a method of forming marks nonparallel to the direction of generation of a factor that hinders reading and a method of forming marks while offsetting marking positions in a direction perpendicular to the direction of generation of the factor of hindrance are combined to enable the consecutive marks to have different portions subjected to hindrance to reading, and the results of reading of the marks are compared with each other to perform processing for complementation of the portion subjected to the hindrance.
Claims20
A method of producing a substrate with a mark, comprising:
- a marking step of forming a mark having an information on a surface of a substrate;
- and
- a reading step of reading the mark,
- wherein prior to the reading step, at least a part of the mark is formed in a region of the substrate where a factor that hinders the reading of the mark in the reading step is not generated.
A mark reading program for reading marks formed on a surface of a substrate, the program making a computer execute:
- a step of reading a plurality of marks;
- a step of saving the results of reading of the marks as data;
- a step of acessing data preceding and succeeding occurrence of a read error when the error occurs;
- a step of comparing the accessed data with each other;
- and
- a step of inferring and complementing data in which the data error has occurred on the basis of the result of the comparison.
A mark reading apparatus for reading marks formed on a surface of a substrate, comprising:
- means for reading marks;
- means for saving the read marks as data;
- and
- means for inferring and complementing, when a read error occurs, at least a portion of data in which the data error has occurred on the basis of data stored by the means for saving preceding and succeeding the mark at which the read error has occurred.
Dependencies are inferred from the claim text.