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US 2004/0166425 A1Published application
Time-optimal setpoint generator in a lithographic apparatus
AssigneeASML Netherlands B.V.
InventorJoris Jan Van Der Sande
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Abstract
The present invention discloses a lithographic apparatus, a device manufacturing method, and a robotics system capable of specifying a trajectory to be followed by a substrate relative to a radiation beam comprising a position and/or an orientation as a function of time. The specified trajectory is characterized as a mathematical smooth function up to at least the third order which connects a first state and a second state, wherein both the first state and the second state comprise boundary values for at least the position and/or the orientation and for first and second derivatives of the position and/or orientation.
Claims28
A device manufacturing method comprising:
- providing a beam radiation;
- projecting said beam of radiation onto a substrate having radiation sensitive material;
- and
- specifying a trajectory to be followed by said substrate relative to said projected beam of radiation, said trajectory being characterized at least as a third order mathematical function containing information indicative of at least one of a position and an orientation as a function of time, said trajectory connecting a first state and a second state representing boundary values for said at least position and orientation and for first and second derivatives of said at least position and orientation,
- wherein said specified trajectory provides the shortest connection in time between said first and second state and wherein said first derivative, said second derivative, and a third derivative of said specified trajectory are bound by predetermined values.
2 more elements
A lithographic apparatus comprising:
- a radiation system for providing a beam of radiation;
- a substrate holder for holding a substrate having radiation sensitive material;
- a projection system for projecting said beam of radiation onto a target portion of said substrate;
- a setpoint generator configured to specify a trajectory to be followed by said substrate relative to said projected beam of radiation, said trajectory being characterized at least as a third order mathematical function containing information indicative of at least one of a position and an orientation as a function of time, said trajectory connecting that a first state and a second state representing boundary values for said at least position and orientation and for first and second derivatives of said at least position and orientation;
- and
- a drive unit configured to move at least one of said substrate holder and said projection system according to the specified trajectory,
- wherein said setpoint generator specifies a trajectory which provides a shortest connection in time between said first and second state, wherein said first derivative, said second derivative, and a third derivative of said trajectory are bound by predetermined values.
4 more elements
A computer-readable medium encoded with a plurality of processor-executable instruction sequences for:
- determining a position of at least one of a substrate or a projected beam of radiation;
- and
- specifying a trajectory to be followed by said substrate relative to said projected beam of radiation, said trajectory being characterized at least as a third order mathematical function containing information indicative of at least one of a position and an orientation as a function of time, said trajectory connecting a first state and a second state representing boundary values for said at least position and orientation and for first and second derivatives of said at least position and orientation,
- wherein said specified trajectory provides the shortest connection in time between said first and second state and wherein said first derivative, said second derivative, and a third derivative of said specified trajectory are bound by predetermined values.
1 more element
A robotics system comprising:
- a first movable element;
- a second element;
- a setpoint generator configured to specify a trajectory to be followed by said first element relative to said second element, said trajectory being characterized at least as a third order mathematical function containing information indicative of at least one of a position and an orientation as a function of time, said trajectory connecting a first state and a second state representing boundary values for said at least position and orientation and for first and second derivatives of said at least position and orientation;
- and
- a drive unit for moving the first element with respect to the second element according to the specified trajectory,
- wherein said setpoint generator specifies a trajectory which provides a shortest connection in time between said first and second state, wherein said first derivative, said second derivative, and a third derivative of said trajectory are bound by predetermined values.
3 more elements
Dependencies are inferred from the claim text.