Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device in which the holder is installed

Abstract

Affords for semiconductor manufacturing devices a wafer holder and a semiconductor manufacturing device in which it is installed, where in the wafer holder, which has a wafer-carrying side, the isothermal quality of its wafer-carrying side is enhanced. A shaft that supports the wafer holder having a wafer-carrying side is joined to the wafer holder, wherein by making a distance a between the center axis of the shaft and the axial center of the wafer-carrying side 5% or less of the diameter L of the wafer-carrying side, the temperature distribution in the surface of a wafer set into place on the holder can be brought to within ±1.0%. Moreover, making the distance a 1% or less of the diameter L enables the temperature distribution to be brought to within ±0.5%.

Dependencies are inferred from the claim text.