Position sensor
AssigneeCanon Kabushiki Kaisha
InventorsHiroshi Sato, Kazuhiko Mishima
Life of this patent
Estimating the term…
Abstract
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus includes an optical system for directing light from the object to the light receiving element, and a first optical element transmitting light from the object, disposed in said partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
Claims17
A position detecting apparatus for detecting position of an object disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus comprising;
- an optical system for directing light from the object to the light receiving element;
- and
- a first optical element transmitting light from the object, disposed in said partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
A position detecting apparatus that uses light to detect a position of an object, said position detecting apparatus comprising:
- an optical element disposed on a partitioning member for partitioning two spaces having different pressures;
- and
- a correction member for correcting an optical change caused by a deformation of said optical element.
A position detecting apparatus located across a first space and a second space that has a different pressure from that of the first space, said position sensor using light to detect a position of an object that is located in the first space, said position sensor comprising:
- a detector, located in the second space, for receiving the light from the object;
- a polarizer that defines a polarization direction of the light;
- and
- an optical element that transmits the light, partitions the first and second spaces, and is closer to said detector than said polarizer.
An exposure apparatus for exposing an object, said exposure apparatus comprising a position-detecting apparatus used for an alignment or focusing of the object, said position detecting apparatus disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus comprising;
- an optical system for directing light from the object to the light receiving element;
- and
- a first optical element transmitting light from the object, disposed in said partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
A device fabricating method comprising the steps of:
- exposing an object using an exposure apparatus;
- and
- developing the exposed object,
- wherein said exposure apparatus includes a position detecting apparatus used for an alignment or focusing of the object, said position detecting apparatus disposed in a first space by receiving light from the object with a light receiving element disposed outside said first space, said position detecting apparatus comprising;
- an optical system for directing light from the object to the light receiving element;
- and
- a first optical element transmitting light from the object, disposed in said partitioning member for partitioning said first space and space outside said first space, wherein said first optical element is located on a position on or near a pupil plane or a plane conjugate to the pupil plane of said optical system.
Dependencies are inferred from the claim text.