Modular stage with reaction force cancellation

A scanning stage device comprising:

• a table, the table being arranged to support an object;
• a fine stage assembly, the fine stage assembly being arranged to carry the table;
• and
• a coarse stage assembly, the coarse stage assembly including a first stage and a second stage, the first stage including a first carriage and a second carriage that are coupled to the fine stage assembly through a plurality of linkages, the second stage being arranged to substantially support the first stage and to move the first stage along a first axis through approximately a center of gravity of the first stage to move the fine stage assembly along the first axis, wherein the first carriage and the second carriage are arranged to be driven in substantially opposite directions along the first axis to move the fine stage assembly along a second axis.

A method of positioning an object, the object being supported by a table assembly of a stage device, the table assembly being coupled to a first actuator and a second actuator, the first actuator and the second actuator being included on a stage of the stage device, the method comprising:

• determining when the object is to be moved along a first axis;
• driving the first actuator and the second actuator in substantially opposite directions along a second axis to move the object along the first axis when it is determined that the object is to be moved along the first axis;
• determining when the object is to be moved along the second axis;
• and
• driving the stage along the second axis to move the object along the second axis when it is determined that the object is to be moved along the second axis.

A method of positioning an object, the object being supported by a table assembly of a stage device, the table assembly being coupled to a first actuator and a second actuator, the method comprising:

• determining when the object is to be moved along a first axis;
• driving the first actuator and the second actuator in substantially opposite directions along a second axis to move the object along the first axis when it is determined that the object is to be moved along the first axis;
• determining when the object is to be moved along the second axis;
• and
• driving the first actuator and the second actuator in substantially the same direction along the second axis to move the object along the second axis when it is determined that the object is to be moved along the second axis.

A stage apparatus comprising:

• a first table assembly, the first table assembly being arranged to support a first object to be moved;
• a second table assembly, the first table assembly being arranged to support a second object to be moved;
• a first stage, the first stage including a first counter mass arrangement, a first plurality of carriages, and a first plurality of linkages, the first plurality of carriages being coupled to the first table assembly through the first plurality of linkages, wherein a first carriage of the first plurality of carriages and a second carriage of the first plurality of carriages are arranged to move in substantially opposite directions along a first axis to cause the first table assembly to move along a second axis while reaction forces generated when the first carriage of the first plurality of carriages and the second carriage of the first plurality of carriages are substantially cancelled by the first counter mass arrangement;
• and
• a second stage, the second stage including a second counter mass arrangement, a second plurality of carriages, and a second plurality of linkages, the second plurality of carriages being coupled to the second table assembly through the second plurality of linkages, wherein a first carriage of the second plurality of carriages and a second carriage of the second plurality of carriages are arranged to move in substantially opposite directions along a second axis to cause the second table assembly to move along a first axis while reaction forces generated when the first carriage of the second plurality of carriages and the second carriage of the second plurality of carriages are substantially cancelled by the second counter mass arrangement.