Vapor deposition device
OwnerUwe Hoffmann, Andreas Kloppel +2inventors
InventorsUwe Hoffmann, Andreas Kloppel, Andreas Jischke, Peter Sauer
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Abstract
A vapor deposition device for vapor deposition of vertically aligned regions of a substrate has an upright, electrically heated melting crucible having an electrical heater for the material to be vaporized. A nozzle pipe, which is separate from the melting crucible and is sealable on top, having a vapor outlet for vapor deposition of the substrate, is seated on the melting crucible. The nozzle pipe has a heater which is independent of the heater of the melting crucible.
Claims10
A vapor deposition device for vapor deposition of vertically aligned regions of a substrate, in which an upright melting crucible, having a heater for melting and vaporizing material poured into the melting crucible, is positioned and which has a deflection device for deflecting the vapor flowing vertically out of the melting crucible horizontally toward the substrate,
- characterized in that the deflection device is a nozzle pipe, placed from above on the melting crucible and sealable on top, which has a horizontal vapor outlet in its lateral surface, and the nozzle pipe has a heater which is independent of the heater of the melting crucible.
Dependencies are inferred from the claim text.