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US 2004/0106068 A1Published application
Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorMarcel Mathijs Theodore Marie Dierichs
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Abstract
A sensor is used to detect luminescent radiation that is radiated from a reflector as a result of state changes induced by a beam of radiation being incident on an area of the reflector. The intensity of the luminescent radiation at particular wavelengths can be used to determine the intensity of the beam of radiation.
Claims14
A lithographic projection apparatus comprising:
- a radiation system configured to provide an unpatterned projection beam of radiation;
- a support structure configured to support a patterning device, the patterning device configured to pattern the unpatterned projection beam according to a desired pattern;
- a substrate table configured to hold a substrate;
- a projection system configured to project the patterned projection beam onto a target portion of the substrate,
- a sensor configured to detect luminescent radiation radiated by at least one region of an area on a component of the apparatus traversed by the unpatterned projection beam or the patterned projection beam;
- and
- a control device configured to determine the intensity, in the at least one region, of the unpatterned projection beam or the patterned projection beam from the detected luminescent radiation.
4 more elements
A device manufacturing method, comprising:
- providing a substrate that is at least partially covered by a layer of radiation-sensitive material;
- providing an unpatterned projection beam of radiation using a radiation system;
- projecting a patterned projection beam of radiation onto a target portion of the layer of radiation-sensitive material;
- detecting luminescent radiation radiated by at least one region of an area on a component traversed by the unpatterned projection beam or the patterned projection beam;
- and
- determining the intensity, in the at least one region, of the unpatterned projection beam or the patterned projection beam from the detected luminescent radiation.
3 more elements
Dependencies are inferred from the claim text.