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US 2004/0106048 A1Published application
Modular containment cell arrangements
AssigneeIntel Corporation
InventorsEric M. Panning, Hok-Kin Choi
Life of this patent
Estimating the term…
Abstract
Modular containment cell arrangements, including modular containment cells to contain an item and at least one processing material associated with processing of the item.
Claims35
A processing containment cell to contain an item and at least one processing material associated with processing of the item.
A semiconductor processing test cell to controllably contain a test item and at least one processing by-product of the test item.
A processing method comprising:
- containing an item to be processed within a containment cell to contain an item and at least one processing material associated with processing of the item;
- and,
- processing while the item is contained within the containment cell.
A processing system comprising:
- a processing apparatus;
- and
- at least one processing containment cell processable within the processing apparatus, to contain an item and at least one processing material associated with processing of the item.
Dependencies are inferred from the claim text.