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US 2004/0105320 A1Published application
Semiconductor memory device including magneto resistive element and method of fabricating the same
AssigneeKabushiki Kaisha Toshiba
InventorTakeshi Kajiyama
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Abstract
A semiconductor memory device includes a semiconductor substrate, and a first magneto resistive element separated from the semiconductor substrate, and including a first magnetic layer and a first nonmagnetic layer. The first magnetic layer and the first nonmagnetic layer are formed in a direction perpendicular to the semiconductor substrate.
Claims37
A semiconductor memory device comprising:
- a semiconductor substrate;
- and
- a first magneto resistive element separated from said semiconductor substrate, said first magneto resistive element comprising a first magnetic layer and a first nonmagnetic layer, said first magnetic layer and said first nonmagnetic layer being formed in a direction perpendicular to said semiconductor substrate.
A method of manufacturing a semiconductor memory device, comprising:
- forming first wiring above a semiconductor substrate;
- forming a first insulating film on the first wiring;
- forming second and fourth wiring on the first insulting film, the fourth wiring being formed away from the second wiring with a first space therebetween;
- partially forming a second insulating film on the first insulating film and on the second and fourth wiring to form a first trench in the first space;
- forming first and second magneto resistive elements on two side surfaces of the first trench, the first magneto resistive element comprising a first magnetic layer and a first nonmagnetic layer, the first magnetic layer and the first nonmagnetic layer being formed in a direction perpendicular to the semiconductor substrate, the second magneto resistive element comprising a second magnetic layer and a second nonmagnetic layer, and the second magnetic layer and the second nonmagnetic layer being formed in the direction perpendicular to the semiconductor substrate;
- removing the first insulating film from a bottom surface of the first trench between the first and second magneto resistive elements to form a contact hole which exposes a portion of the first wiring, and removing a portion of the second insulating film which are positioned above the second and fourth wiring to form second and third trenches;
- forming a contact in the contact hole, the contact being connected to the first wiring and to the first and second magneto resistive elements;
- and
- forming third and sixth wiring in the second and third trenches, respectively, the third wiring being connected to the first magneto resistive element, and the sixth wiring being connected to the second magneto resistive element.
6 more elements
Dependencies are inferred from the claim text.