Cooling device with multiple compliant elements

An apparatus for cooling a plurality of devices, comprising:

• a housing;
• a bottom plate disposed in said housing, said bottom plate having first openings therein;
• a cover plate for closing said housing;
• a second plate supported in said housing between said bottom plate and said cover plate to define a first space between said cover plate and said second plate and a second space between said second plate and said bottom plate, said second plate having second openings therein, said second openings being aligned with respective first openings;
• an outer cooling element for contacting each of the devices to be cooled;
• an outer tube for connecting each of said outer cooling elements to said bottom plate, each of said outer tubes being received in a respective one of said second openings;
• an inner cooling element received within said outer cooling element, each of said inner cooling elements having a connecting opening;
• an inner tube within each of said outer tubes for connecting each of said second cooling elements to said second openings so as to define a flow space between said inner tube and said outer tube;
• whereby a path for flow of coolant is defined extending along said first space, said inner tube, said connecting opening, said flow space, and said second space.

A method of assembling a cooling apparatus to a carrier having devices to be cooled, the method comprising:

• partially evacuating at least one chamber in said cooling apparatus so as to move cooling elements in a direction and to a position wherein cooling surfaces of said cooling devices can not contact said devices when said cooling apparatus and said carrier are assembled;
• placing said cooling apparatus over said carrier;
• and
• allowing fluid to enter said at least one chamber so that said cooling surfaces are forced into contact with said devices.