Method of supporting and adjusting optical element in exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorRyuichi Ebinuma
Life of this patent
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Abstract
Disclosed is a supporting structure for supporting an optical element in an optical system, particularly for use in a semiconductor exposure apparatus. The supporting structure includes a first holding member having at least two supporting portions for supporting a peripheral portion of the optical system, and a second holding member for supporting the optical element, wherein the second holding member is connected to the first holding member, between the at least two supporting portions of the first holding member, through an elastic member.
Claims20
A supporting structure for supporting an optical element, comprising:
- a first holding member having at least two supporting portions for supporting a peripheral portion of the optical system;
- and
- a second holding member for supporting the optical element, said second holding member being connected to said first holding member, between said at least two supporting portions of said first holding member, through an elastic member.
A supporting structure for supporting an optical element, comprising:
- a first holding member having one supporting portion for supporting a peripheral portion of the optical element;
- and
- at least two second holding members for supporting the optical element and being connected to said first holding member through an elastic member.
A supporting structure for supporting an optical element, comprising:
- a first holding member;
- and
- at least three second holding members for supporting the optical element and being connected to said first holding member through an elastic member.
Dependencies are inferred from the claim text.