MEMS device with alternative electrical connections
OwnerBruce K. Wachtmann, David J. Collins +1inventors
InventorsBruce K. Wachtmann, David J. Collins, Thomas D. Chen
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Abstract
A MEMS device has a first silicon layer, a second silicon layer, and an insulating layer between the first and second silicon layers. The first silicon layer has at least a primary portion and an isolated portion, where the isolated portion has no electrical connection with the primary portion via the first silicon layer. The MEMS device also has a conductive element within the insulating layer. The conductive element is in electrical contact with both the primary portion and the isolated portion.
Claims20
A MEMS device comprising:
- a first silicon layer having at least a primary portion and an isolated portion, the isolated portion having no electrical connection with the primary portion via the first silicon layer;
- a second silicon layer;
- an insulating layer between the first and second silicon layers;
- and
- a conductive element within the insulating layer, the conductive element being in electrical contact with both the primary portion and the isolated portion.
A MEMS device having a plurality of layers, the MEMS device comprising:
- a first layer having at least a primary portion and an isolated portion;
- a second layer;
- and
- a conductive element in contact with the second layer, the conductive element electrically connecting the primary portion and the isolated portion.
A MEMS device having a plurality of layers, the MEMS device comprising:
- a first layer having at least a primary portion and an isolated portion, the isolated portion having no electrical connection with the primary portion via the first layer;
- a second layer;
- and
- means for electrically connecting the primary portion and the isolated portion via the second layer.
Dependencies are inferred from the claim text.