Illumination apparatus, exposure method, exposure apparatus, and device manufacturing method

An illumination apparatus for illuminating a surface to be illuminated with a radiation, comprising:

• a radiation source;
• an adjusting optics including a plurality of optical elements;
• and
• an optical integrator,
• wherein the adjusting optics controls an inner and/or outer radial extent of an illumination distribution on an illumination pupil,
• wherein the plurality of optical elements can be inserted in an illumination optical path,
• wherein each of the plurality of optical elements defines at least one parameter of the illumination distribution on the illumination pupil, and
• wherein at least two of the plurality of optical elements can be arranged in the illumination optical path simultaneously.

An illumination apparatus for illuminating a surface to be illuminated with a radiation, comprising:

• a radiation source;
• an adjusting optics including a plurality of optical elements;
• and
• an optical integrator,
• wherein the adjusting optics controls an inner and/or outer radial extent of an illumination distribution on an illumination pupil,
• wherein the plurality of optical elements can be inserted in an illumination optical path,
• wherein each of the plurality of optical elements define at least one parameter of the illumination distribution on the illumination pupil, and
• wherein the adjusting optics excludes an axicon.

An illumination apparatus for illuminating a surface to be illuminated with a radiation, comprising:

• a radiation source;
• a first member with a plurality of elements arranged in an array;
• a second member with a plurality of elements arranged in an array,
• wherein the plurality of elements of the first and the second member are each assigned to light channels, and the plurality of elements are configured or arranged such that a continuous beam path from the radiation source to the surface to be illuminated results for each light channel, and
• wherein the assignment can be manipulated such that, by assigning the plurality of elements of the first to the second member, a predetermined illumination is adjusted in an illumination pupil of the illumination apparatus.

An illumination apparatus for illuminating a surface to be illuminated with a radiation, comprising:

• a radiation source;
• a first member with a plurality of elements arranged in an array;
• a second member with a plurality of elements arranged in an array,
• wherein the plurality of elements of the first and the second member are each assigned to light channels, and the plurality of elements are configured or arranged such that a continuous beam path from the radiation source to the surface to be illuminated results for each light channel, and
• the second member with the plurality of elements can be exchanged and at least one particular illumination in an illumination pupil can be achieved with each second member, so that by replacing the second member, a different assignment of the plurality of elements of the first member with the plurality of elements of the second member is realized.