Surface modification process of quartz glass crucible
AssigneeJapan Super Quartz Corporation
InventorsToshio Tsujimoto, Yoshiyuki Tsuji
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Abstract
A process for modifying the surface of a quartz glass crucible and a modified quartz glass crucible produced by the process, where the crucible has a transparent coated layer containing a crystallization accelerator on the surface. The process includes coating a mixed solution containing a metal salt and a partial hydrolyzate of alkoxysilane oligomer on the surface of the crucible and heating to obtain a quartz glass crucible having a transparent coated layer. The crystallization accelerator contains a metal oxide or a metal carbonate dispersed in a silica matrix.
Claims17
A process for modifying a surface of a quartz glass crucible, said process comprising,
- coating a silica sol liquid comprising a metal salt and a partial hydrolyzate of an alkoxysilane oligomer on said surface of said crucible, and
- heating said crucible coated with said silica sol liquid to form a transparent coated layer comprising a crystallization accelerator derived from said metal salt.
A quartz glass crucible, comprising a transparent coated layer, wherein said coated layer comprises a crystallization accelerator dispersed in a silica matrix on at least a portion of an inside and/or an outside surface of said crucible.
Dependencies are inferred from the claim text.