Optical deflector and method of producing same

A method of producing an optical deflector having a supporting substrate, an elastic supporting part and a movable plate, comprising the steps of:

• preparing a silicon substrate having a first side for formation of a reflective surface and a second side;
• forming mask layers on the first and the second sides of the silicon substrate;
• removing the mask layer on the first side except an area thereof for formation of the supporting substrate, elastic supporting part and movable plate;
• removing the mask layer on the second side except an area thereof for formation of the supporting substrate, elastic supporting part and movable plate and also removing the mask layer on an area for formation of a recess within the area for formation of the movable plate;
• dipping the silicon substrate in an aqueous alkaline solution to perform anisotropic etching to form the silicon substrate into the supporting substrate, the elastic supporting part and the movable plate and to form the recess on one side of the movable plate;
• removing the mask layers on the silicon substrate;
• forming a reflective film on the first side of the movable plate;
• and
• providing a magnetic material in the recess.