Method and device for non-destructive analysis of perforations in a material
AssigneeAradigm Corporation
InventorsJeffrey A. Schuster, Sudarsan Srinivasan, Thor Miller Wilbanks
Life of this patent
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Abstract
Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.
Claims55
A method of fabricating a pore array, comprising:
- directing light onto a sheet of material in a pore array fabrication position wherein the light having an intensity and a wavelength sufficient to form pores within the sheet;
- forming a pore array within the sheet wherein pores formed within the sheet at the locations where the light contacts a surface of the sheet and further wherein the light passes through the pores;
- detecting the light passing through the pores;
- and
- analyzing the detected light to determine if the pores meet a criterion which is a function of one or more of the group consisting of pore size, pore density, pore shape and the number of pores formed.
A device for fabricating a pore array, comprising:
- a means for directing light onto a sheet of material and forming a pore array therein, the pore array comprising a plurality of pores, said means including a light source associated with a beam splitter;
- a means for detecting light passing through the pores of the pore array as the pores are formed;
- a means for analyzing the detected light to determine if the pores meet a criteria;
- and
- a means for continuously repositioning sheets relative to the means for directing light.
A method of simultaneously manufacturing and inspecting a pore, comprising:
- directing light energy on a surface of a sheet material in an amount sufficient to create at least one pore in the material;
- detecting light passing through the sheet material opposite the surface at which the light energy is directed;
- and
- analyzing the detected light to determine at least one criterion of the at least one pore.
A system for manufacturing and analyzing a pore array, comprising:
- a light source capable of directing light onto the surface of a sheet material in an amount sufficient to drill a plurality of pores in the sheet material;
- and
- a light detector adapted to be positioned adjacent the sheet material on a side of the sheet material which is opposite the surface at which the light is directed.
A method for the fabrication of an array of pores, comprising:
- directing light from a light source of appropriate wavelength to fabricate the array of pores in a sheet;
- detecting the light transmitted through the pores wherein the detected light demonstrates the number of the pores;
- and
- stopping the directing of light when the transmitted light demonstrates that the pores are of the correct number.
A method of simultaneously manufacturing and inspecting a plurality of pores, comprising:
- directing light energy on a surface of a material in an amount sufficient to create the plurality of pores in the material;
- detecting light passing through the plurality of pores opposite the surface at which the light energy is directed;
- and
- analyzing the detected light to determine at least one criterion of the plurality of pores being formed.
A system for manufacturing and analyzing pores, comprising:
- a light source capable of directing light onto the surface of a material in an amount sufficient to drill at least one pore in the material;
- a feedback control means connected to the light source for discontinuing the direction of light
- a light detector connected to the feedback control means, adapted to be positioned adjacent the material and on a side of the membrane material which is opposite the surface at which the light is directed, and adapted to analyze light passing through the material and the at least one pore, when formed;
- and
- wherein the feedback control means discontinues the direction of light when at least one predetermined criterion of the at least one pore has been met.
Dependencies are inferred from the claim text.