Differential measurement method using eddy-current sensing to resolve a stack of conducting films on substrates
OwnerMoshe Sarfaty, Ramaswamy Sreenivasan +1inventors
InventorsMoshe Sarfaty, Ramaswamy Sreenivasan, Cuong Duy Le
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Abstract
In a first aspect, a method of inspecting objects is provided. The method includes the steps of (1) measuring sheet resistance of a first stack of conducting films deposited on an object, said first stack having a topmost conducting film; (2) depositing a subsequent conducting film on said first stack of conducting films to form a second stack; (3) measuring sheet resistance of said second stack; and (4) calculating sheet resistance of the subsequent conducting film. A thickness of the subsequent conducting film may be determined based on the sheet resistance of the subsequent conducting film. Numerous other aspects are provided.
Claims17
A method of inspecting objects, said method comprising:
- a. measuring sheet resistance of a first stack of conducting films deposited on an object, said first stack having a topmost conducting film;
- b. depositing a subsequent conducting film on said first stack of conducting films to form a second stack;
- c. measuring sheet resistance of said second stack;
- and
- d. calculating sheet resistance of the subsequent conducting film based on the sheet resistance of the first stack and the sheet resistance of the second stack.
A method of inspecting objects, said method comprising:
- a. measuring sheet resistance of a first stack of conducting films deposited on an object, said first stack having a topmost conducting film;
- b. measuring sheet resistance of a second stack of conducting films formed by depositing a subsequent conducting film on said first stack;
- and
- c. calculating sheet resistance of the subsequent conducting film.
An apparatus comprising:
- a sensor adapted to measure a sheet resistance of a stack of conducting films;
- and
- a controller coupled to the sensor, the controller having computer program code adapted to direct the controller to:
- a. measure sheet resistance of a first stack of conducting films deposited on an object using the sensor, said first stack having a topmost conducting film;
- b. measure sheet resistance of a second stack of conducting films using the sensor, the second stack of conducting films formed by depositing a subsequent conducting film on said first stack;
- and
- c. calculate sheet resistance of the subsequent conducting film.
Dependencies are inferred from the claim text.