Compositionally modified resistive electrode
AssigneeOvonyx, Inc.
InventorsTyler A. Lowrey, Daniel Xu, Chien Chiang, Patrick J. Neschleba
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Abstract
An apparatus comprising a volume of memory material and a pair of spacedly disposed conductors. An electrode coupled to the volume of memory material and disposed between the volume of memory material and one conductor comprises a first material having a first resistivity value and a second material having a different second resistivity value formed by exposing the first material to a gaseous ambient.
Claims22
An apparatus comprising:
- a volume of memory material;
- a conductor;
- and
- an electrode coupled to the volume of memory material and posed between the volume of memory material and the conductor, the electrode comprising a first portion having a first resistivity value and a second portion having a different second resistivity value formed by exposing the first portion to an ambient.
An apparatus comprising:
- a chalcogenide memory element;
- and
- a heater element in thermal communication with the chalcogenide memory element, the heater element comprising:
- a first zone having a first resistivity and a first thermal coefficient of resistivity;
- and
- a second zone formed by exposing a portion of the first zone to an ambient and having a second resistivity and a second thermal coefficient of resistivity, wherein the first resistivity is lower than the second resistivity, and wherein the second thermal coefficient of resistivity has a less negative or positive variation to positive temperature change than the first thermal coefficient of resistivity.
An apparatus comprising:
- a plurality of memory elements, each memory element comprising a volume of memory material having two resistivity values, the volume of memory material being settable to one of the resistivity values in response to a selected electrical input signal;
- a conductor coupled to each memory element;
- and
- an electrode coupled to the volume of memory material and disposed between the volume of memory material and the conductor, the electrode comprising a first portion having a first resistivity value and a second portion having a different second resistivity value formed by exposing the electrode to an ambient.
A method comprising:
- introducing between two conductors formed on a substrate an electrode material;
- modifying a portion of the electrode material so that the electrode material comprises a first portion and a different second portion by exposing the electrode material to a gaseous ambient;
- and
- introducing a volume of memory material over the electrode material, the electrode material and the volume of memory material coupled to a conductor.
The method of claim 19, wherein the distance between the volume of memory material and the one conductor defines a depth of the electrode material and introducing the modifying species comprises introducing the modifying species to a depth related to a voltage required to set a resistance value of the volume of the memory material. 22. The method of claim 21, wherein modifying comprises modifying a portion of the electrode such that the modified portion is directly adjacent the volume of memory material.
Dependencies are inferred from the claim text.